This volume brings together a very high proportion of what anyone with a general scientific or enginneering background will need to know to make a contribution to MEMS research or development. The choice of material to include is impeccable; here is all the practical stuff you need, with no dross or padding. Many academics may not agree, but I would suspect a couple of readings of this book to be worth more than some masters courses.I have followed D Banks' online guide to MEMS as it developed, and you can tell from this volume that the material has been very carefully considered and honed with much more care than many similar works as a result of his online efforts.Other classics to consider include Madou's "Fundamentals of Microfabrication" and for CMOS electronic device layout, Baker and Boyce's CMOS: "Circuit Design, Layout, and Simulation". Having said this, I feel Bank's book is the best place for those new to MEMS to start if they want to be productive almost immediately.

Microengineering, MEMS, and Interfacing: A Practical Guide PDF

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