The goal of this book is to bring together into one accessible  text the fundamentals of the many disciplines needed by today's  engineer working in the field of microelectromechanical systems  (MEMS).   The subject matter is wide-ranging: microfabrication, mechanics, heat  flow, electronics, noise, and dynamics of systems, with and without  feedback. Because it is very difficult to enunciate principles of  `good design' in the abstract, the book is organized around a set of  Case Studies that are based on real products, or, where appropriately  well-documented products could not be found, on thoroughly published  prototype work.   The Case Studies were selected to sample a multidimensional space:  different manufacturing and fabrication methods, different device  applications, and different physical effects used for transduction.  The Case Study subjects are: the design and packaging of a  piezoresistive pressure sensor, a capacitively-sensed accelerometer, a  quartz piezoelectrically-driven and sensed rate gyroscope, two  electrostatically-actuated optical projection displays, two  microsystems for the amplification of DNA, and a catalytic sensor for  combustible gases.   This book is used for a graduate course in `Design and Fabrication of  Microelectromechanical Devices (MEMS)' at the Massachusetts Institute  of Technology. It is appropriate for textbook use by senior/graduate  courses in MEMS, and will be a useful reference for the active MEMS  professional.   Each chapter is supplemented with homework problems and suggested  related reading. In addition, the book is supported by a web site that  will include additional homework exercises, suggested design problems  and related teaching materials, and software used in the textbook  examples and homework problems.

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