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Tribology Issues and Opportunities in MEMS: Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997 PDF

pages650 Pages
release year1998
file size45.71 MB
languageEnglish
by L. Hermans (auth.), Bharat Bhushan (eds.)
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