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Iron distribution in the implanted silicon under the action of high-power pulsed ion and laser beams

authorBayazitov R., Batalov R., Nurutdinov R., Shustov V., Gaiduk P., Dezsi I., Kotai E.
pages5 Pages
file size0.157 MB

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Secondary Ion Mass Spectrometry SIMS V: Proceedings of the Fifth International Conference, Washington, DC, September 30 – October 4, 1985

authorR. E. Honig (auth.), Professor Dr. Alfred Benninghoven, Dr. Richard J. Colton, Dr. David S. Simons, Dr. Helmut W. Werner (eds.)
pages577 Pages
release year1986
file size14.847 MB